arXiv 1002.22242010-02-10physics.comp-ph

光MEMS开关静电驱动器的性能分析及集总参数优化

Performance Analysis and Optimization of Lumped Parameters of Electrostatic Actuators for Optical MEMS Switches

D. Mohana Geetha, M. Madheswaran

备注：: IEEE format, International Journal of Computer Science and Information Security, IJCSIS January 2010, ISSN 1947 5500, http://sites.google.com/site/ijcsis/
发表信息：: International Journal of Computer Science and Information Security, IJCSIS, Vol. 7, No. 1, pp. 209-215, January 2010, USA

摘要：

本文采用有限元分析方法对静电驱动固支梁和悬臂梁进行了设计和仿真。本文详细研究了不同偏置电压下的器件性能。研究了在不同偏压下，梁的不同尺寸和固有模或主模的吸合电压以及相应的本征值。梁的位移也研究了各种尺寸的梁。通过大量的模拟，得到了固定梁和悬臂梁的长度和宽度的结果。结果表明，吸合电压在2348 ~ 772 V之间变化，固有频率在102.92 ~ 916.35 KHz之间变化。

英文摘要：

This Paper deals design and simulation of electrostatically actuated clamped clamped beam and cantilever beam using finite element analysis method (FEM). A detailed study and performance analysis for various bias voltages is provided in this paper. The pull in voltages for different dimensions of the beams and the natural or the dominant modes and the corresponding eigenvalues have been studied for different bias voltages. The displacement of the beam is also studied for various dimensions of the beam. The results were obtained for the length and the width of both clamped clamped beam and cantilever beam through extensive simulations. The results obtained shows that pull in voltages varies from 2348V to 772V and the natural frequencies vary from 102.92 KHz to 916.35 KHz.

机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。