气泡动力微型转子：概念、制造、装配和表征
A bubble-powered micro-rotor: conception, manufacturing, assembly, and characterization
摘要：
在超声波作用下，微气泡附近会产生一种稳定的流体流动，称为微流。在这篇文章中，我们利用这一现象组装和动力的微型转子转速高达625转。可提取功率估计为几个毫微微瓦的量级。第一系列的实验与不受控制的转子形状，证明了这种新的驱动方案的可能性。第二个系列的实验与65微米转子微制造的SU-8树脂。控制转速和转子稳定性的变量进行了研究，如气泡直径，声激励频率和振幅，和转子的几何形状。最后，提供了一个展望，发展这种微转子到MEMS为基础的电机能够提供可调的，无穷小的旋转功率在微尺度。
英文摘要：
A steady fluid flow, called microstreaming, can be generated in the vicinity of a micro-bubble excited by ultrasound. In this article, we use this phenomenon to assemble and power a microfabricated rotor at rotation speeds as high as 625 rpm. The extractible power is estimated to be on the order of a few femtowatts. A first series of experiments with uncontrolled rotor shapes is presented, demonstrating the possibility of this novel actuation scheme. A second series of experiments with 65 micron rotors micromanufactured in SU-8 resin are presented. Variables controlling the rotation speed and rotor stability are investigated, such as the bubble diameter, the acoustic excitation frequency and amplitude, and the rotor geometry. Finally, an outlook is provided on developing this micro-rotor into a MEMS-based motor capable of delivering tunable, infinitesimal rotary power at the microscale.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
