利用超窄碳纳米管加热器诱导硫系化合物相变
Inducing Chalcogenide Phase Change with Ultra-Narrow Carbon Nanotube Heaters
摘要:
碳纳米管(CNT)加热器与子-5 nm直径诱导高度本地化的相变Ge 2Sb 2 Te 5(GST)的硫属化物。当靠近CNT加热器的GST结晶时,测量到测试结构的电阻显著降低。有效的GST加热发生在低至25 μ A的电流下,显著低于具有金属电极的常规相变存储器(0.1-0.5 mA)。原子力显微镜揭示了与相变在GST周围的CNT加热器的成核网站。有限元模拟证实了与实验一致的电气特性,并揭示了电流和相位分布的GST。
英文摘要:
Carbon nanotube (CNT) heaters with sub-5 nm diameter induce highly localized phase change in Ge2Sb2Te5 (GST) chalcogenide. A significant reduction in resistance of test structures is measured as the GST near the CNT heater crystallizes. Effective GST heating occurs at currents as low as 25 uA, significantly lower than in conventional phase change memory with metal electrodes (0.1-0.5 mA). Atomic force microscopy reveals nucleation sites associated with phase change in GST around the CNT heater. Finite element simulations confirm electrical characteristics consistent with the experiments, and reveal the current and phase distribution in GST.
机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。