脉冲Laser沉积过程中表面扩散率和粗化的测量
Measurements of Surface Diffusivity and Coarsening During Pulsed Laser Deposition
摘要：
利用<001>原位X射线镜面反射和表面X射线漫散射研究了脉冲激光沉积（PLD）同质外延SrTiO_3薄膜。与以前的反射率为基础的研究，这些测量访问的时间和长度尺度的表面形态在生长过程中的演变。特别是，我们表明，这种技术允许直接测量层间和层内运输的扩散率。我们的研究结果明确地限制了可能的作用，岛分裂，证明了PLD中的成核和粗化所发挥的关键作用，并放置在Ehrlich-Schwoebel（ES）的障碍下坡扩散的上限。
英文摘要：
Pulsed Laser Deposition (PLD) of homoepitaxial SrTiO3 <001> was studied with in-situ x-ray specular reflectivity and surface diffuse x-ray scattering. Unlike prior reflectivity-based studies, these measurements access both the time- and the length-scales of the evolution of the surface morphology during growth. In particular, we show that this technique allows direct measurements of the diffusivity for both inter- and intra-layer transport. Our results explicitly limit the possible role of island break-up, demonstrate the key roles played by nucleation and coarsening in PLD, and place an upper bound on the Ehrlich-Schwoebel (ES) barrier for downhill diffusion.
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