累积离子等离子体装置中准平衡稳态凝聚的自组织
Self-organization of quasi-equilibrium stationary condensation in accumulative ion-plasma devices
摘要：
本文从理论和实验两方面研究了累积型离子等离子体装置中溅射物质准平衡稳态凝聚的自组织过程。自组织效应是由冷凝温度和沉积原子过饱和度的自洽变化引起的。在相平面方法的基础上，我们发现两种不同类型的自组织过程是可能的。讨论了铝冷凝物的实验数据，证实了准平衡稳态冷凝过程的自组织性质。
英文摘要：
We consider both theoretically and experimentally self-organization process of quasi-equilibrium steady-state condensation of sputtered substance in accumulative ion-plasma devices. The self-organization effect is shown to be caused by self-consistent variations of the condensate temperature and the supersaturation of depositing atoms. On the basis of the phase-plane method, we find two different types of the self-organization process to be possible. Experimental data related to aluminum condensates are discussed to confirm self-organization nature of quasi-equilibrium steady-state condensation process.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
