在牛顿液体介质中具有高标称品质因数的微机械压电膜：微尺度下Lamb模型的验证
Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale
摘要：
尽管悬臂梁结构被广泛认为是最有前途的适合于液体介质中实时测量的硅基微机械传感器之一，但其品质因数（Q）仍然严重依赖于液体粘度，从而降低了测量分辨率。在本文中，微机械压电膜作为一个潜在的替代生物应用的杠杆。报道了微机械压电薄膜在不同液体混合物（水/甘油和水/乙醇）中谐振的高Q因子（高达150），并提出了Lamb [H. Lamb，关于与水接触的弹性板的振动，Proc. Roy。长索克A 98（1920）205？216]的微尺度结构的验证，证明液体粘度的变化（如果低于10 cP）对膜的动态行为没有影响。总之，在水/甘油混合物中进行两种类型的实验：流入（液体在装置上连续流动）和现场（单个膜在5 $μ$ L体积的液体中振荡）。结果有趣地表明，对于现场配置，Q因子值是对应于流入测量的Q因子值的两倍以上，从而提供了对构思用于液体介质中的实时生物测量的理想配置的方式的替代见解。
英文摘要：
Although extensively presented as one of the most promising silicon-based micromachined sensor adapted to real-time measurements in liquid media, the cantilevered structure still suffers from its quality factor (Q) dramatic dependence on the liquid viscosity thus lowering the measurement resolution. In this paper, micromachined piezoelectric membranes are introduced as a potential alternative to the cantilevers for biological applications. HighQ-factors (up to 150) of micromachined piezoelectric membranes resonating in various liquid mixtures (water/glycerol and water/ethanol) are thus reported and a theoretical model proposed by Lamb [H. Lamb, On the vibrations of an elastic plate in contact with water, Proc. Roy. Soc. Lond. A 98 (1920) 205?216] is validated for microscale structures proving that the variation of the liquid viscosity (if lower than 10 cP) has no effect on the dynamic behavior of the membranes. To conclude, two types of experiments were performed in water/glycerol mixtures: in-flow (with liquid continuously flowing on the devices) and in-spot (with individual membranes oscillating in a 5 $μ$L volume of liquid). The results interestingly showed that for the in-spot configuration the Q-factor values are more than two-fold the ones corresponding to in-flow measurements thus providing alternative insights into the way to conceive ideal configurations for real-time biological measurements in liquid media.
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