The Parallel Nanowire Detector (PND) is a photon number resolving (PNR) detector which uses spatial multiplexing on a subwavelength scale to provide a single electrical output proportional to the photon number. The basic structure of the PND is the parallel connection of several NbN superconducting nanowires (100 nm-wide, few nm-thick), folded in a meander pattern. PNDs were fabricated on 3-4 nm thick NbN films grown on MgO (TS=400C) substrates by reactive magnetron sputtering in an Ar/N2 gas mixture. The device performance was characterized in terms of speed and sensitivity. PNDs showed a counting rate of 80 MHz and a pulse duration as low as 660ps full width at half maximum (FWHM). Building the histograms of the photoresponse peak, no multiplication noise buildup is observable. Electrical and optical equivalent models of the device were developed in order to study its working principle, define design guidelines, and develop an algorithm to estimate the photon number statistics of an unknown light. In particular, the modeling provides novel insight of the physical limit to the detection efficiency and to the reset time of these detectors. The PND significantly outperforms existing PNR detectors in terms of simplicity, sensitivity, speed, and multiplication noise.
We present the experimental demonstration of a superconducting photon number resolving detector. It is based on the series connection of N superconducting nanowires, each connected in parallel to an integrated resistor. The device provides a single voltage readout, proportional to the number of photons absorbed in distinct nanowires. Clearly separated output levels corresponding to the detection of n=1-4 photons are observed in a 4-element detector fabricated from an NbN film on GaAs substrate, with a single-photon system quantum efficiency of 2.6% at the wavelength of 1300nm. The series-nanow…
We present a 1024-element imaging array of superconducting nanowire single photon detectors (SNSPDs) using a 32x32 row-column multiplexing architecture. Large arrays are desirable for applications such as imaging, spectroscopy, or particle detection.
We describe a micromachining process to allow the coupling of an array of single-mode telecommunication fibers to individual superconducting nanowire single photon detectors (SNSPDs). As proof of principle, we show the integration of four detectors on the same silicon chip, including two standard single-section nanowire detectors and two superconducting nanowire avalanche photodetectors (SNAPs) with modified series structure without external inductor, and their performances are compared. The SNAP shows saturated system detection efficiency of 16% while the dark count rate is less than 20 Hz, w…
We investigate the recovery of superconducting NbN-nanowire photon counters after detection of an optical pulse at a wavelength of 1550 nm, and present a model that quantitatively accounts for our observations. The reset time is found to be limited by the large kinetic inductance of these nanowires, which forces a tradeoff between counting rate and either detection efficiency or active area. Devices of usable size and high detection efficiency are found to have reset times orders of magnitude longer than their intrinsic photoresponse time.
Time- and number-resolved photon detection is crucial for photonic quantum information processing. Existing photon-number-resolving (PNR) detectors usually have limited timing and dark-count performance or require complex fabrication and operation. Here we demonstrate a PNR detector at telecommunication wavelengths based on a single superconducting nanowire with an integrated impedance-matching taper. The prototyping device was able to resolve up to five absorbed photons and had 16.1 ps timing jitter, <2 c.p.s. device dark count rate, $\sim$86 ns reset time, and 5.6% system detection efficienc…
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on ultrathin NbN films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400C. The superconducting properties of NbN films were optimized studying the effects of deposition parameters on film properties. SSPDs were fabricated on high quality NbN films of different thickness (7 to 3nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the S…
Here we propose a new design paradigm for a superconducting nanowire single photon detector that uses a multi-layer architecture that places the electric leads beneath the nanowires. This allows for a very large number of detector elements, which we will call pixels in analogy to a conventional CCD camera, to be placed in close proximity. This leads to significantly better photon number resolution than current single and multi-nanowire meanders, while maintaining similar detection areas. We discuss the reset time of the pixels and how the design can be modified to avoid the latching failure se…
We present the characterization of two-dimensionally arranged 64-pixel NbTiN superconducting nanowire single-photon detector array for spatially resolved photon detection. NbTiN films deposited on thermally oxidized Si substrates enabled the high-yield production of high-quality SSPD pixels, and all 64 SSPD pixels showed uniform superconducting characteristics. Furthermore, all of the pixels showed single-photon sensitivity, and 60 of the 64 pixels showed a pulse generation probability higher than 90% after photon absorption. As a result of light irradiation from the single-mode optical fiber …
Superconducting nanowire avalanche single-photon detectors (SNAPs) with n parallel nanowires are advantageous over single-nanowire detectors because their output signal amplitude scales linearly with n. However, the SNAP architecture has not been viably demonstrated for n > 4. To increase n for larger signal amplification, we designed a multi-stage, successive-avalanche architecture which used nanowires, connected via choke inductors in a binary-tree layout. We demonstrated an avalanche detector with n = 8 parallel nanowires and achieved eight-fold signal amplification, with a timing jitter of…
The optical-to-electrical conversion, which is the basis of optical detectors, can be linear or nonlinear. When high sensitivities are needed single-photon detectors (SPDs) are used, which operate in a strongly nonlinear mode, their response being independent of the photon number. Nevertheless, photon-number resolving (PNR) detectors are needed, particularly in quantum optics, where n-photon states are routinely produced. In quantum communication, the PNR functionality is key to many protocols for establishing, swapping and measuring entanglement, and can be used to detect photon-number-splitt…
We demonstrate waveguide-integrated superconducting nanowire single-photon detectors on thin-film lithium niobate (LN). Using a 250 um-long NbN superconducting nanowire lithographically defined on top of a 125 um-long LN nanowaveguide, on-chip detection efficiency of 46% is realized with simultaneous high performance in dark count rate and timing jitter. As LN possesses high second-order nonlinear \c{hi}(2) and electro-optic properties, an efficient single-photon detector on thin-film LN opens up the possibility to construct small scale fully-integrated quantum photonic chip which includes sin…
High-quality ultra-thin films of niobium nitride (NbN) are developed by plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon detectors (SNSPDs) patterned from this material exhibit high switching currents and saturated internal efficiencies over a broad bias range at 1550 nm telecommunication wavelength. Statistical analyses on hundreds of fabricated devices show near-unity throughput yield due to exceptional homogeneity of the films. The ALD-NbN material represents an ideal superconducting material for fabricating large single-photon detector array…
We demonstrate a scalable readout scheme for an infrared single-photon pulse-position camera consisting of WSi superconducting nanowire single-photon detectors (SNSPDs). For an N x N array, only 2 x N wires are required to obtain the position of a detection event. As a proof-of-principle, we show results from a 2 x 2 array.
We present a novel design of a superconducting nanowire single photon detector (SNSPD) fabricated on a core of a single mode optical fiber. The proposed design allows high overlap between the fiber light mode and the detector, and consequently, our fabricated devices can remain small in dimension and maintain speed of operation, without scarifying the detection efficiency. The on-fiber fabrication method is detailed, together with experimental results. The proposed method can be exploited in the future for the fabrication of other fiber coupled devices.
We investigated the reset time of superconducting nanowire avalanche photodetectors (SNAPs) based on 30 nm wide nanowires. We studied the dependence of the reset time of SNAPs on the device inductance and discovered that SNAPs can provide a speed-up relative to SNSPDs with the same area, but with some limitations: (1) reducing the series inductance of SNAPs (necessary for the avalanche formation) could result in the detectors operating in an unstable regime; (2) a trade-off exists between maximizing the bias current margin and minimizing the reset time of SNAPs; and (3) reducing the reset time…
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. The best device showed a system detection efficiency (DE) of 74%, dark count rate of 100 c/s, and full width at half maximum timing jitter of 68 ps under a bias current of 18.0 uA with a practical Gifford-McMahon cryocooler system. We also introduced six detectors into the cryocooler and confirmed that the system DE of all detectors was higher than 67% at the dark count rate of 100 c/s.
We demonstrate the integration of amorphous tungsten silicide superconducting nanowire single-photon detectors on titanium in-diffused lithium niobate waveguides. We show proof-of-principle detection of evanescently-coupled photons of 1550nm wavelength using bidirectional waveguide coupling for two orthogonal polarization directions. We investigate the internal detection efficiency as well as detector absorption using coupling-independent characterization measurements. Furthermore, we describe strategies to improve the yield and efficiency of these devices.
Quantum photonic integration circuits are a promising approach to scalable quantum processing with photons. Waveguide single-photon-detectors (WSPDs) based on superconducting nanowires have been recently shown to be compatible with single-photon sources for a monolithic integration. While standard WSPDs offer single-photon sensitivity, more complex superconducting nanowire structures can be configured to have photon-number-resolving capability. In this work, we present waveguide photon-number-resolving detectors (WPNRDs) on GaAs/Al0.75Ga0.25As ridge waveguides based on a series connection of n…
Detecting spatial and temporal information of individual photons by using single-photon-detector (SPD) arrays is critical to applications in spectroscopy, communication, biological imaging, astronomical observation, and quantum-information processing. Among the current SPDs1,detectors based on superconducting nanowires have outstanding performance2, but are limited in their ability to be integrated into large scale arrays due to the engineering difficulty of high-bandwidth cryogenic electronic readout3-8. Here, we address this problem by demonstrating a scalable single-photon imager using a si…
In this paper, the design of superconducting-nanowire single-photon detectors which are insensitive to the polarization of the incident light is investigated. By using high-refractive-index dielectrics, the index mismatch between the nanowire and the surrounding media is reduced. This enhances the absorption of light with electric field vector perpendicular to the nanowire segments, which is generally hindered in this kind of detectors. Building on this principle and focusing on NbTiN nanowire devices, we present several easy-to-realize cavity architectures which allow high absorption efficien…
Multiphoton contributions pose a significant challenge for the realisation of heralded single-photon sources (HSPS) based on nonlinear processes. In this work, we improve the quality of single photons generated in this way by harnessing the photon-number resolving (PNR) capabilities of commercial superconducting nanowire single-photon detectors (SNSPDs). We report a $13 \pm 0.4 \%$ reduction in the intensity correlation function $g^{(2)}(0)$ even with a collection efficiency in the photon source of only $29.6\%$. Our work demonstrates the first application of the PNR capabilities of SNSPDs and…
We propose an optimized design for nanowire superconducting single photon detectors, using the recently discovered position dependent detection efficiency in these devices. This knowledge allows an optimized the design of meandering wire NbN detectors by altering the field distribution across the wire. In order to calculate the response of the detectors with different geometries, we use a monotonic local detection efficiency from a nanowire and optical absorption distribution via finite-different-time-domain simulations. The calculations predict a trade-off between average absorption and the e…
We report on simulation results that shows optimum photon absorption by superconducting nanowires can happen at a fill-factor that is much less than 100%. We also present experimental results on high performance of our superconducting nanowire single photon detectors realized using NbTiN on oxidized silicon.
Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs). Grown by molecular beam epitaxy (MBE) at high temperature on nearly lattice-matched AlN-on-sapphire substrates, the NbN films exhibit high degree of uniformity and homogeneity. Even with relatively thick films, the fabricated nanowire detectors show saturated internal efficiency at near-IR wavelengths, demonstrating the potential of MBE-grown NbN for realiz…
Superconducting nanowire single photon detectors (SNSPDs) are fabricated directly on diamond substrates and their optical and electrical properties are characterized. Dark count performance and photon count rates are measured at varying temperatures for 1310nm and 632nm photons. The procedure to prepare diamond substrate surfaces suitable for the deposition and patterning of thin film superconducting layers is reported. Using this approach, diamond substrates with less than 300pm RMS surface roughness are obtained.
We report the fabrication of a superconducting nanowire single-photon detector (SSPD or SNSPD) with an ultralow dark count rate. By introducing optical band-pass filters at the input of the SSPD and cooling the filters at 3 K, the dark count rate is reduced to less than 1/100 at low bias. An SSPD with 0.1 cps dark count rate and 5.6% system detection efficiency at 1550 nm wavelength is obtained. We show that a quantum key distribution (QKD) over 300 km of fiber is possible based on a numerical calculation assuming a differential phase shift QKD protocol implemented with our SSPDs.
Single-photon detectors based on superconducting nanowires (SSPDs or SNSPDs) have rapidly emerged as a highly promising photon-counting technology for infrared wavelengths. These devices offer high efficiency, low dark counts and excellent timing resolution. In this review, we consider the basic SNSPD operating principle and models of device behaviour. We give an overview of the evolution of SNSPD device design and the improvements in performance which have been achieved. We also evaluate device limitations and noise mechanisms. We survey practical refrigeration technologies and optical coupli…
We demonstrate superconducting nanowire single photon detectors with 76 +/- 4 % system detection efficiency at a wavelength of 315 nm and an operating temperature of 3.2 K, with a background count rate below 1 count per second at saturated detection efficiency. We propose integrating these detectors into planar surface electrode radio-frequency Paul traps for use in trapped ion quantum information processing. We operate detectors integrated into test ion trap structures at 3.8 K both with and without typical radio-frequency trapping electric fields. The trapping fields reduce system detection …
We demonstrate niobium titanium nitride superconducting nanowires patterned on stoichiometric silicon nitride waveguides for detecting visible and infrared photons. The use of silicon nitride on insulator on silicon substrates allows us to simultaneously realize photonic circuits for visible and infrared light and integrate them with nanowire detectors directly on-chip. By implementing a traveling wave detector geometry in this material platform, we achieve efficient single photon detection for both wavelength regimes. Our detectors are an ideal match for integrated quantum optics as they prov…
We investigate the operation of WSi superconducting nanowire single-photon detectors (SNSPDs) at 2.5 K, a temperature which is ~ 70 % of the superconducting transition temperature (TC) of 3.4 K. We demonstrate saturation of the system detection efficiency at 78 +- 2 % with a jitter of 191 ps. We find that the jitter at 2.5 K is limited by the noise of the readout, and can be improved through the use of cryogenic amplifiers. Operation of SNSPDs with high efficiency at temperatures very close to TC appears to be a unique property of amorphous WSi.
We measure the maximal distance at which two absorbed photons can jointly trigger a detection event in NbN nanowire superconducting single photon detector (SSPD) microbridges by comparing the one-photon and two-photon efficiency of bridges of different overall lengths, from 0 to 400 nm. We find a length of $23 \pm 2$ nm. This value is in good agreement with to size of the quasiparticle cloud at the time of the detection event.
Despite very efficient superconducting nanowire single-photon detectors (SNSPDs) reported recently, combining their other performance advantages such as high speed and ultra-low timing jitter in a single device still remains challenging. In this work, we present a perfect absorber model and corresponding detector design based on a micron-long NbN nanowire integrated with a 2D-photonic crystal cavity of ultra-small mode volume, which promises simultaneous achievement of near-unity absorption, gigahertz counting rates and broadband optical response with a 3 dB bandwidth of 71 nm. Compared to pre…
We use quantum detector tomography to investigate the detection mechanism in WSi nanowire superconducting single photon detectors (SSPDs). To this purpose, we fabricated a 250nm wide and 250nm long WSi nanowire and measured its response to impinging photons with wavelengths ranging from $λ$ = 900 nm to $λ$ = 1650 nm. Tomographic measurements show that the detector response depends on the total excitation energy only. Moreover, for energies Et > 0.8eV the current energy relation is linear, similar to what was observed in NbN nanowires, whereas the current-energy relation deviates from linear be…
We developed superconducting nanowire single-photon detectors with an optical cavity (OC-SNSPDs) for multichannel systems. For efficient coupling, the devices were installed in compact fiber-coupled packages after their substrate thickness was reduced from 400 to 45 $μ$m. The measured detection efficiency (DE) measurement at different substrate thicknesses and the estimation of optical coupling efficiency indicated that ~98% of the input light beam could be radiated on a 15x15 $μm^2$ nanowire area from behind the substrate. The DEs of a NbN OC-SNSPD system were observed to be 9.5% and 25% at 1…
We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ~60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ~50 ps.
Superconducting nanowire single photon detectors are a key technology for quantum information and science due to their high efficiency, low timing jitter, and low dark counts. In this work, we present a detector for single 1550 nm photons with up to 78% detection efficiency, timing jitter below 50 ps FWHM, 158 counts/s dark count rate - as well as a world-leading maximum count rate of 1.5 giga-counts/s at 3 dB compression. The PEACOQ detector (Performance-Enhanced Array for Counting Optical Quanta) comprises a linear array of 32 straight superconducting niobium nitride nanowires which span the…
