利用高速MEMS反射镜的多路复用宽带光束控制系统
Multiplexed broadband beam steering system utilizing high speed MEMS mirrors
摘要：
我们提出了一种基于微机电系统技术的光束转向系统，其特征在于在宽波长范围内高速转向多个激光束。通过利用宽带金属涂层的高速微镜，我们的系统具有灵活性，同时纳入了广泛的波长和多个光束。我们演示了两个独立的光束在不同的波长（780和635 nm）在一个共同的5x5阵列与4 us的建立时间的重新配置。光学系统的完整仿真提供了对系统可扩展性的见解。这种系统可以为需要快速激光多路复用的应用提供通用工具。
英文摘要：
We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 us settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.
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