具有亚微米拾取环的阶梯扫描超导量子干涉器件灵敏度计
A Terraced Scanning Superconducting Quantum Interference Device Susceptometer with Sub-Micron Pickup Loops
摘要：
超导量子干涉器件（SQUID）可以具有优异的自旋灵敏度，这取决于它们的磁通量噪声、拾波环直径和与样品的距离。我们报告了一个家庭的扫描SQUID温度计与梯田的提示，定位的拾音圈300 nm的样品。600 nm - 2 μ m的拾波回路，由聚焦离子束定义，集成到一个12层的光学光刻过程中，允许通量锁定反馈，原位背景扣除和优化的通量噪声。这些特征使得在4K下每根赫兹约70个电子自旋的灵敏度成为可能。
英文摘要：
Superconducting Quantum Interference Devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pick-up loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pick-up loops 300 nm from the sample. The 600 nm - 2 um pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ~70 electron spins per root Hertz at 4K.
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