纳米谐振器中剪切水平声表面波粗糙散射引起的品质因数
Quality factor due to roughness scattering of shear horizontal surface acoustic waves in nanoresonators
摘要：
在这项工作中，我们研究的品质因数与耗散由于剪切水平表面声波散射随机自仿射粗糙度。结果表明，表面粗糙度指数H和粗糙度振幅w与横向相关长度X之比对品质因数有很大影响。实际上，粗糙度指数H>0.5的品质因数与由于固有耗散机制（例如，热弹性损失和声子-声子散射），特别是对于波矢量<1/X。我们的研究结果表明，这种耗散机制应仔细考虑在设计微/纳机电系统。
英文摘要：
In this work we study the quality factor associated with dissipation due to scattering of shear horizontal surface acoustic waves by random self-affine roughness. It is shown the quality factor is strongly influenced by both the surface roughness exponent H, and the roughness amplitude w to lateral correlation length X ratio. Indeed, quality factors for roughness exponents H>0.5 are comparable to quality factors due to intrinsic dissipation mechanisms (e.g., thermoelastic losses and phonon-phonon scattering) especially for wave vectors <1/X. Our results indicate that this dissipation mechanism should be carefully considered in the design micro/nanoelectromechanical systems.
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