动态支架沉积法制备一维高度可调纳米结构
Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition
摘要：
动态模板沉积（DSD）技术提供了传统光刻工艺不可能实现的各种制造优势，例如直接沉积具有可编程高度轮廓的纳米结构的能力。然而，DSD系统由于其复杂性而尚未得到广泛使用。我们展示了一个简单，低调，便携式，一维纳米翻译系统，方便访问纳米级DSD的能力。此外，我们还展示了各种制造的高度可编程的纳米结构，包括这种结构的平行阵列，并提出了利用DSD制造方法的独特能力的其他应用。
英文摘要：
Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the the ability to directly deposit nanostructures with programmable height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.
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