纳米结构的离子束成形和缩小
Ion beam shaping and downsizing of nanostructures
摘要：
我们报告了一种新的方法，逐步和良好控制的缩小纳米结构低于10 nm的规模。低能量离子束（Ar+）用于温和的表面腐蚀，逐渐缩小尺寸，精度约为1 nm。该方法能够使纳米结构几何形状成形并抛光表面。该工艺是洁净室/高真空兼容的，适用于各种应用。除了技术优势外，该方法还可以在离子束处理期间研究同一样品上的各种尺寸现象。
英文摘要：
We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.
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