NeXT卫星上软X射线成像仪n通道CCD，CCD-NeXT1的研制
Development of an n-channel CCD, CCD-NeXT1, for Soft X-ray Imager onboard the NeXT satellite
摘要：
NeXT（新X射线望远镜）是继朱雀卫星之后的下一个日本X射线天文卫星任务。NeXT旨在执行宽带成像光谱。由于成功开发了多层镀膜反射镜，称为超级反射镜，NeXT可以聚焦能量范围从0.1 keV到80 keV的X射线。为了覆盖这个宽的能量范围，我们正在开发一种混合X射线相机，宽带X射线成像仪（WXI）作为超反射镜的焦平面探测器。WXI由X射线CCD（SXI）和CdTe像素化探测器（HXI）组成，分别覆盖0.1-80 keV的较低和较高X射线能量带。SXI的X射线CCD堆叠在HXI的CdTe像素化探测器上方。SXI的X射线CCD可探测$\sim$ 10 keV以下的软X射线，并允许硬X射线无损耗地进入HXI的CdTe探测器。因此，我们一直在开发一种“背支撑CCD”与厚耗尽层，薄硅晶片，和背支撑结构。在本文中，我们报告的发展和性能的评价模型的CCD的SXI，“CCD-NeXT 1”。我们成功地制作了两种类型的CCD-NeXT 1，未减薄的CCD与625 μ m厚的晶片和150 μ m厚的减薄CCD。通过在制造减薄CCD时省略抛光过程，我们证实抛光过程不会影响X射线性能。此外，我们没有发现两种CCD之间的X射线性能存在显著差异。能量分辨率和读出噪声分别为$\sim$ 140 eV（FWHM）（5.9 keV）和$\sim$ 5电子（RMS）。耗尽层的估计厚度为$\sim$ 80 μ m。各项性能指标基本满足SXI基线计划的要求。
英文摘要：
NeXT (New X-ray Telescope) is the next Japanese X-ray astronomical satellite mission after the Suzaku satellite. NeXT aims to perform wide band imaging spectroscopy. Due to the successful development of a multilayer coated mirror, called a supermirror, NeXT can focus X-rays in the energy range from 0.1 keV up to 80 keV. To cover this wide energy range, we are in the process of developing a hybrid X-ray camera, Wideband X-ray Imager (WXI) as a focal plane detector of the supermirror. The WXI consists of X-ray CCDs (SXI) and CdTe pixelized detectors (HXI), which cover the lower and higher X-ray energy bands of 0.1-80 keV, respectively. The X-ray CCDs of the SXI are stacked above the CdTe pixelized detectors of the HXI. The X-ray CCDs of the SXI detect soft X-rays below $\sim$ 10 keV and allow hard X-rays pass into the CdTe detectors of the HXI without loss. Thus, we have been developing a "back-supportless CCD" with a thick depletion layer, a thinned silicon wafer, and a back-supportless structure. In this paper, we report the development and performances of an evaluation model of CCD for the SXI, "CCD-NeXT1". We successfully fabricated two types of CCD-NeXT1, unthinned CCDs with 625-um thick wafer and 150-um thick thinned CCDs. By omitting the polishing process when making the thinned CCDs, we confirmed that the polishing process does not impact the X-ray performance. In addition, we did not find significant differences in the X-ray performance between the two types of CCDs. The energy resolution and readout noise are $\sim$ 140 eV (FWHM) at 5.9 keV and $\sim$5 electrons (RMS), respectively. The estimated thickness of the depletion layer is $\sim$80 um. The performances almost satisfy the requirements of the baseline plan of the SXI.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
