层状半导体结构光声研究中的非线性畸变消除方法
The method of non-linear distortions elimination in photoacoustic investigation of layered semiconductor structure
摘要：
本文提出了考虑光声测量装置的非线性失真的存在及其对多层半导体结构热特性分析结果的影响。作者提出了一种消除这种影响的方法。
英文摘要：
This paper presents the consideration of the presence and the influence of non-linear distortion of photo-acoustic measurement set-up on the results of thermal properties analysis for the multi-layer semiconductor structure. The authors propose a method which will eliminate such an influence.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
