CCD热反射热成像系统：方法学和实验验证
CCD Thermoreflectance Thermography System: Methodology and Experimental Validation
摘要：
本文介绍了一种基于热反射的系统，该系统设计用于测量激活的微电子器件的表面温度场，其空间分辨率为亚微米，可以使用激光器或CCD相机。本文介绍了该系统，概述了测量方法，并提出了验证结果。热反射热成像（TRTG）系统能够以0.2 $μ$ m的分辨率采集高达512 × 512点的器件表面温度场。的设置和测量方法，以及所需的校准过程的细节转换测量表面反射率的变化，绝对温度。为了证明该系统的能力，标准金微电阻被激活，并测量其表面温度场。CCD相机和我们现有的基于激光的测量方法的结果进行了比较，发现是非常好的协议。最后，通过比较TRTG方法获得的温度与电阻测量获得的温度，验证了该系统。
英文摘要：
This work introduces a thermoreflectance-based system designed to measure the surface temperature field of activated microelectronic devices at submicron spatial resolution with either a laser or a CCD camera. The article describes the system, outlines the measurement methodology, and presents validation results. The thermo-reflectance thermography (TRTG) system is capable of acquiring device surface temperature fields at up to 512x512 points with 0.2 $μ$m resolution. The setup and measurement methodology are presented, along with details of the calibration process required to convert changes in measured surface reflectivity to absolute temperatures. To demonstrate the system's capabilities, standard gold micro-resistors are activated and their surface temperature fields are measured. The results of the CCD camera and our existing laser-based measurement approaches are compared and found to be in very good agreement. Finally, the system is validated by comparing the temperatures obtained with the TRTG method with those obtained from electrical resistance measurements.
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