光脉冲加热热反射法测量薄膜的热物性
Measurements of Thermophysical Property of Thin Films by Light Pulse Heating Thermoreflectance Methods
摘要：
皮秒脉冲加热和纳秒脉冲加热的热反射方法已经由日本国家计量研究所（AIST）在与激光闪光方法相同的几何配置下开发。使用这些光脉冲加热方法，多层薄膜的每一层的热扩散率和层之间的边界热阻可以基于响应函数法从所观察到的瞬态温度曲线确定。将介绍用于平板显示器的透明导电膜、硬涂层膜和下一代相变光盘的多层膜等各种薄膜的测量结果。
英文摘要：
Thermoreflectance methods by picosecond pulse heating and by nanosecond pulse heating have been developed under the same geometrical configuration as the laser flash method by the National Metrology Institute of JAPAN, AIST. Using these light pulse heating methods, thermal diffusivity of each layer of multilayered thin films and boundary thermal resistance between the layers can be determined from the observed transient temperature curves based on the response function method. The measurement results of various thin films as transparent conductive films used for flat panel displays, hard coating films and multilayered films of the next generation phase-change optical disk will be presented.
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