悬臂梁和音叉传感器中高频皮尺度共振的扫描光学零差检测
Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors
摘要：
高次谐波模式在纳米硅杠杆和微米级石英音叉检测和使用自定义扫描光学零差干涉仪的特点。这些谐振器能够进行质量和力感测，表现出高频谐波运动内容，在2.5 MHz带宽内检测到皮米级幅度，由环境热辐射驱动。石英音叉还显示面内和面外谐波。前六个电子检测到的共振匹配光学检测和映射叉本征模式。利用更高音叉模式的质量感测实验表明比基模操作灵敏度提高> 6倍。
英文摘要：
Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate >6x sensitivity enhancement over fundamental mode operation.
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