基于电荷密度波系统的自灵敏扭转微谐振器
Self-sensitive torsional microresonators based on a charge-density wave system
摘要：
近来，在机电装置的小型化方面已经有了显著的进展。大多数微纳机电系统（MEMS-NEMS）都工作在谐振模式下。由于压电和电磁发动机在这个尺寸范围内是无能为力的，所以微米尺寸以及亚微米尺寸的器件通常由静电力驱动。这种发动机可以扮演NEMS的外部执行器的角色，然而，它们本身就是宏设备。除了致动之外，NEMS的目标是获得表征振荡的输出信号1，因此，感测其自身运动的致动器是相当热门的（例如，参见2）。不久前，出现了几个作品，证明准一维导体的尺寸3，4和形式5的电荷密度波（CDW）的变形的高灵敏度。在这里，我们展示了电驱动扭转谐振器的准一维导体与CDW，TaS 3的晶须的基础上。扭转变形的驱动力是CDW系统所特有的，反映了CDW变形向晶格的传递。与压电体相比，电场对晶体形变的影响要大3-4个数量级。发现谐振器还提供来自振荡的扭转引起的电反馈（输出信号）。我们讨论了CDW系统作为NEMS-MEMS的有前途的元素。
英文摘要：
Recently, there have been dramatic advances in the miniaturization of electromechanical devices. Most of the micro- and nanoelectromechanical systems (MEMS-NEMS) operate in the resonant modes1. The micron-, and, the more, the submicron-sizes devices, are driven usually by electrostatic forces, as piezoelectric and electromagnetic engines are powerless over this size range. Such engines could play the role of external actuators for the NEMS, being, however, macro devices in their own. Apart from actuation, an objective of NEMS is getting the output signal characterizing the oscillations1, so, actuators sensing their own motion are rather topical (see 2 for example). Not long ago, several works appeared demonstrating high sensitivity of the sizes3,4 and form5 of quasi one-dimensional conductors to the deformations of the charge-density wave (CDW). Here we demonstrate electrically driven torsional resonators based on whiskers of the quasi one-dimensional conductor with CDW, TaS3. The driving force for the torsional deformation is peculiar to the CDW systems and reflects the transmission of the CDW deformation to the crystalline lattice. In comparison with the piezoelectrics, the effect of electric field on the crystal deformation is 3-4 orders of magnitude larger. The resonator is found to provide also a torsion-induced electrical feed-back (output signal) from the oscillations. We discuss the CDW systems as promising elements for NEMS-MEMS.
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