液体中电和机电成像用绝缘SPM探针的制造、动力学和电性能
Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and Electromechanical Imaging in Liquids
摘要：
制作了具有高深宽比导电尖端的绝缘悬臂梁探针，并对其动态和电学特性进行了分析。用二氧化硅涂覆电极杆，并通过尖端顶点处的氧化物制造通孔，并用钨回填，以创建具有导电尖端的绝缘探针。改进后的悬臂梁刚度和Q值均有所提高，其共振频率向高频方向移动。确定了悬臂梁与涂层之间的耦合强度。应用导电和机电成像的铁电畴的说明，并证明了探针顶点修复过程。
英文摘要：
Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q-factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. The applications to conductive and electromechanical imaging of ferroelectric domains are illustrated, and a probe apex repair process is demonstrated.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
