重构表面在硅纳米谐振器本征耗散动力学中的作用
The Role of Reconstructed Surfaces in the Intrinsic Dissipative Dynamics of Silicon Nanoresonators
摘要：
利用分子动力学模拟研究了双夹持纳米机械杆谐振器弯曲动力学中的耗散。通过直接模拟一系列具有裸{100}二聚表面的硅棒的振荡，计算了品质因数Q对温度和谐振器尺寸的依赖关系<001>。棒的宽度范围为3.3 - 8.7nm，长度均为22 nm。基模频率范围为40 ~ 90 GHz，Q值从1000 K附近的10^2到50 K附近的10^4。的品质因数被证明是有限的重建表面中的缺陷。
英文摘要：
Dissipation in the flexural dynamics of doubly clamped nanomechanical bar resonators is investigated using molecular dynamics simulation. The dependence of the quality factor Q on temperature and the size of the resonator is calculated from direct simulation of the oscillation of a series of Si <001> bars with bare {100} dimerized surfaces. The bar widths range from 3.3 to 8.7nm, all with a fixed length of 22nm. The fundamental mode frequencies range from 40 to 90GHz and Q from 10^2 near 1000K to 10^4 near 50K. The quality factor is shown to be limited by defects in the reconstructed surface.
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