用尖锐粒子轰击Pyrex和硅表面的标度特性
Scaling properties of pyrex and silicon surfaces blasted with sharp particles
摘要：
脆性材料的尖锐颗粒爆破是许多工业过程中的重要制造技术。特别是，对于微系统，它允许生产具有低至几十微米的特征尺寸的设备。该工艺的一个重要参数是后喷砂表面的表面粗糙度。在这项工作中，Pyrex玻璃和硅表面的氧化铝粒子轰击后的结垢特性进行了研究。分别使用具有两种不同平均尺寸$29μm$和$9μm$的氧化铝颗粒以垂直入射轰击靶。这一调查表明，由此产生的表面具有多重分形特性。应用多重分形去趋势波动分析（MFDFA），使我们能够确定的奇异性谱的表面。该光谱不依赖于目标材料或颗粒的大小。确定了量化相关数量的几个参数。我们认为，尺度低于$5 μm$，断裂过程占主导地位，而在大尺度的长程相关性负责的多重分形行为。
英文摘要：
The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for micro-systems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface roughness of post-blasted surfaces. In this work the scaling properties of Pyrex glass and silicon surfaces after bombardment with alumina particles is investigated. The targets were bombarded at normal incidence using alumina particles with two different average sizes, $29μm$ and $9μm$, respectively. This investigation indicates that the resulting surfaces have multifractal properties. Applying multifractal detrended fluctuation analysis (MFDFA) allowed us to determine the singularity spectrum of the surfaces. This spectrum did not depend on the target material or on the size of the particles. Several parameters quantifying relevant quantities were determined. We argue that for scales below $5 μm$, fracture processes are dominant while at large scales long range correlations are responsible for the multifractal behaviour.
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