类金刚石薄膜粘塑性及摩擦学性能的纳米压痕和纳米划痕研究
Viscoplastic Properties and Tribological Behavior of Diamond-Like Carbon Films Using Nanoindentation and Nanoscratch Tests
摘要：
类金刚石碳（DLC）薄膜具有多种摩擦学特性：在超高真空（UHV）下，摩擦系数低至0.01或更低，磨损非常轻微;或者摩擦系数非常高（>0.4），磨损剧烈。这些行为主要取决于气体环境，薄膜的氢含量[1]，以及其粘塑性[2，3]。对于a-C：H薄膜和氟化样品（a-C：F：H），的确建立了超高真空中的超低摩擦和粘塑性之间的关系。在这项研究中，纳米压痕和nanoscratch测试在环境空气中进行，使用纳米压痕仪，以评估摩擦学行为，以及不同的非晶碳膜的机械和粘塑性性能。
英文摘要：
Diamond-Like Carbon (DLC) films have been shown to demonstrate various tribological behaviors: in ultra-high vacuum (UHV), with either friction coefficients as low as 0.01 or less and very mild wear, or very high friction coefficients (>0.4) and drastic wear. These behaviors depend notably on gaseous environment, hydrogen content of the film [1], and on its viscoplastic properties [2,3]. A relation between superlow friction in UHV and viscoplasticity has indeed been established for a-C:H films and confirmed for a fluorinated sample (a-C:F:H). In this study, nanoindentation and nanoscratch tests were conducted in ambient air, using a nanoindentation apparatus, in order to evaluate tribological behaviors, as well as mechanical and viscoplastic properties of different amorphous carbon films.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
